Microfabrication Class Notes 2021 11 22

Attendees

Mario - PhD speciality with microfab Ben (in Colorado...moved from DC) - elec eng Tristan - instructor Michelle - soft eng, board member (PM...if you ask nicely) Ethan - instructor Oby - elec eng

Approaches

Discussion on varying approaches and implementations

Approach to project implementation

1. Collaborative - work as a group on the same project (something new, something done before)
2. Independent - everyone work independently on their projects

Approach to tech implementation

1. Use an SEM
   1. Option 1 - get enough of the SEM fixed to operate manually
   2. Option 2 - get the full SEM working
   3. Option 3 - get the obviously broken part fabricated and replace it (part on back with dent in back of the SEM)
   4. Option 4 - do Project Awesome fundraising project
   5. Option 5 - the sputtering system issue needs to be resolved as part of the microfab process
   6. Option 6 - a cleaning chamber issue needs to be resolved as part of the microfab process
   7. Option 7 - working with hydrogen chloride indoors to etch glass issue needs to be resolved as part of the microfab process
   8. Option 8 - decide on wet etching vs. dry etching
   9. Option 9 - "rent" Ethan's personal-use SEM (assuming its working)
2. Use The-Next-Best-Thing
   1. Option 1 - Sonic 8K - can -- stick PCB to layers of resin directly to fabricate things at 28 microns
   2. Option 2 - electro chemical plating
   3. Option 3 - UV lithography
   4. Option 4 - electron beam lithography
   5. Option 5 - "do what's been done before" (Ethan)
   6. Option 6 - "create a diode"...the simplest component we can start fabricating (Tristan)
   7. Option 7 - "create a DIY sputtering" system and publish results to community (Ethan)

More on Outsource approach:

tech is moving so fast that the Fab Shops of yesterday doing "1000 nanoML" are obsolete for commercial business/work doing "50 nanoML" and so then outsource to smaller clients that maybe "1000 nanoML" is all they need

Outsource the Fab Work (they have open time/space to run "shuttles" - groups sponsor); They split the cost among a bunch of people. Can get ICs manufactured for $650-$1000. They get put in "shuttles" which people apply for and get decided upon by "lottery." See Skywater link.

Links

https://www.youtube.com/channel/UCivA7_KLKWo43tFcCkFvydw - chemical engineering and material science in a garage (grown nanotubes, made superconductors) http://www.smela.umd.edu/polymer-mems/benchtop.html http://www.smela.umd.edu/documents/Delille,%20bechtop%20MEMS,%20supporting%20info.pdf https://www.youtube.com/channel/UC7E8-0Ou69hwScPW1_fQApA - proper semiconductors https://www.youtube.com/watch?v=TrmqZ0hgAXk - home tour https://www.youtube.com/watch?v=IS5ycm7VfXg - home tour https://www.pfeiffer-vacuum.com/en/know-how/vacuum-generation/vacuum-pumps-working-principles-and-properties/classification-of-pumps/ - High vacuum techniques reference http://dmf.unicatt.it/~gavioli/corsi/MSFM/ref/Vuoto+Camere/Books/Handbook_of_Vacuum_Science_and_Technology.pdf https://github.com/google/skywater-pdk - outsource, open source designs https://wiki.freecadweb.org/Macro_FCCircularText https://wiki.freecadweb.org/Curves_SketchOnSurface https://github.com/google/skywater-pdk https://www.labmanager.com/business-management/buying-a-pre-owned-sem-19283 https://apps.apple.com/us/app/polycam-lidar-3d-scanner/id1532482376